Mechanical profilometer Bruker Dektak XT (DEKTAK)

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Guarantor: Radim Zahradníček, Ph.D.
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 9.10.2023 13:11
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Analysis of processing efficiency, surface, and bulk chemistry, and nanomechanical properties of the Monel® alloy 400 after ultrashort pulsed laser ablation. MATERIALS RESEARCH EXPRESS 11(1), doi: 10.1088/2053-1591/ad184b; FULL TEXT
    (DEKTAK, MIRA-STAN, KRATOS-XPS, NANOINDENTER)
  • Ronoh, K.; Novotný, J.; Mrňa, L.; Knápek, A.; Sobola, D., 2024: Effects of laser and scanning parameters on surface modification of MONEL® alloy 400 by picosecond laser. OPTICS & LASER TECHNOLOGY 172, doi: 10.1016/j.optlastec.2023.110514; FULL TEXT
    (TEGRAMIN, VERIOS, DEKTAK)
  • GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
    (ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
  • POUCHLÝ, V.; TALIMIAN, A.; KAŠTYL, J.; CHVÍLA, M.; ŠČASNOVIČ, E.; BELTRAN, A.; LOZANO, J.; GALUSEK, D., 2023: Transparent LiOH-doped magnesium aluminate spinel produced by spark plasma sintering: Effects of heating rate and dopant concentration. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 43(8), p. 3544 - 9, doi: 10.1016/j.jeurceramsoc.2023.01.059; FULL TEXT
    (DEKTAK)
  • Mouralova, K.; Bednar, J.; Benes, L.; Polzer, A.; Zahradnicek, R.; Fries, J.; Prokes, T., 2023: Machining of 1.2363 and 1.2343ESR steels using EDM. JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING 45(7), doi: 10.1007/s40430-023-04293-9; FULL TEXT
    (DEKTAK, LYRA, TITAN, HELIOS, TEGRAMIN)

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