Mechanical profilometer Bruker Dektak XT (DEKTAK)

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Guarantor: Radim Zahradníček, Ph.D.
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 9.10.2023 13:11
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • Ronoh, K.; Novotný, J.; Mrňa, L.; Knápek, A.; Sobola, D., 2024: Effects of laser and scanning parameters on surface modification of MONEL® alloy 400 by picosecond laser. OPTICS & LASER TECHNOLOGY 172, doi: 10.1016/j.optlastec.2023.110514; FULL TEXT
    (TEGRAMIN, VERIOS, DEKTAK)
  • RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Analysis of processing efficiency, surface, and bulk chemistry, and nanomechanical properties of the Monel® alloy 400 after ultrashort pulsed laser ablation. MATERIALS RESEARCH EXPRESS 11(1), doi: 10.1088/2053-1591/ad184b; FULL TEXT
    (DEKTAK, MIRA-STAN, KRATOS-XPS, NANOINDENTER)
  • Mouralova, K.; Bednar, J.; Benes, L.; Prokes, T.; Zahradnicek, R.; Fries, J., 2023: Mathematical Models for Machining Optimization of Ampcoloy 35 with Different Thicknesses Using WEDM to Improve the Surface Properties of Mold Parts. MATERIALS 16(1), doi: 10.3390/ma16010100; FULL TEXT
    (TEGRAMIN, DEKTAK, LYRA)
  • Benes, L.; Mouralova, K.; Midula, P.; Snow, J.; Lysonkova, I.; Pilnaj, D.; Burdova, H.; Prokes, T.; Zahradnicek, R.; Fries, J.; Kuráň, P.; Kubenka, M., 2023: The Corrosion Behavior of WEDM Machined Stainless Steels in a Pyrolysis Environment. METALS 13(1), doi: 10.3390/met13010144; FULL TEXT
    (DEKTAK, TEGRAMIN, LYRA)
  • Mouralova, K.; Benes, L.; Prokes, T.; Zahradnicek, R.; Fries, J.; Plichta, T., 2023: Analysis of the machinability of different types of sintered carbides with WEDM in both water and oil baths. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 125(5-6), p. 2705 - 2715, doi: 10.1007/s00170-023-10913-4; FULL TEXT
    (DEKTAK, LYRA)

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